Semiconductor gas sensors

Small, low-power and cost-efficient

Semiconductor gas sensors (also: metal oxide sensors, MOX) are electrical conductivity sensors. The resistance of its active sensor layer changes upon contact with the gas to be detected. MOX gas sensors react to almost all reducing and oxidizing gases and thus not only enable the detection of trace gases such as carbon monoxide (CO), nitric oxides (NO_x), ammonia (NH₃), sulfurous gases (H₂S, SO₂), hydrocarbons (C_xH_y), but also the analysis of complex aromas such as volatile organic compounds (VOCs). A high level of selectivity is achieved through a suitable chemical coating. Depending on the material and target gas, operating temperatures between 300 °C and 900 °C are necessary to ensure the intrinsic conductivity of the sensor. The sensitivity level depends on the gas and ranges from a few ppb to the percentage range. The detection limit depends on the gas-sensitive material.

Our offer

• Development of materials tailored to customer needs and specific applications
• Development of customtailored substrates and sensor geometries
• Gas specific characterization of sensors, benchmarking
• Concepts for sensor manufacturing
• Technology consulting