Laser-induced breakdown spectroscopy LIBS

Laser-induced breakdown spectroscopy (LIBS) technology uses short pulse or ultrashort pulse lasers which eject a tiny amount of the sample specimen from the material to be tested into a plasma for spectral analysis. This enables the real-time analysis of the material composition without the need to prepare samples. The LIBS method is suitable for alloy analysis, coating inspection and layer thickness measurement within the range of nanometers to 100 micrometers. It also enables depth-resolved measurement of element composition.


  • Contactless, purely optical
  • Measurement time of milliseconds
  • Inline
  • No sample preparation
  • High spatial resolution
  • Independent of component geometry


  • Imaging layer thickness measurement (galvanic, CVD, PVD)
  • Material analysis in metal industry and mining (rock composition, metal alloys, recycling)
  • Inline measurement in battery production

Applications »Laser-Induces Breakdown Spectroscopy«

Battery production & recycling

Inline process control for lithium recycling

Coating inspection and layer analysis

Fast, precise layer thickness measurement and alloy analysis

Solids analysis

Identifying composition – analyzing hazardous substances

Publications »Laser-induced breakdown spectroscopy«

Publication Type
2024 Technology Selection for Inline Topography Measurement with Rover-Borne Laser Spectrometers
Ryan, Conor; Haist, Tobias; Laskin, Gennadii; Schröder, Susanne; Reichelt, Stephan
Journal Article
2023 Depth-Resolved Elemental Analysis on Moving Electrode Foils with Laser-Induced Breakdown Spectroscopy
Basler, Carl; Kappeler, Moritz; Carl, Daniel
Journal Article
2022 Homogeneity Measurements of Li-Ion Battery Cathodes Using Laser-Induced Breakdown Spectroscopy
Kappeler, Moritz; Basler, Carl; Brandenburg, Albrecht; Carl, Daniel; Wöllenstein, Jürgen
Journal Article
2021 Beschichtungen ortsaufgelöst messen
Basler, Carl; Kappeler, Moritz; Brandenburg, Albrecht
Journal Article
2019 Comparison of Laser Pulse Duration for the Spatially Resolved Measurement of Coating Thickness with Laser-Induced Breakdown Spectroscopy
Basler, Carl; Brandenburg, Albrecht; Michalik, Katarzyna; Mory, David
Journal Article
2019 Produktionsintegrierte Qualifizierung dünner Beschichtungen (DSALIPS)
Mory, David; Laure, Stefan; Basler, Carl; Michalik, Katarzyna
Diese Liste ist ein Auszug aus der Publikationsplattform Fraunhofer-Publica

This list has been generated from the publication platform Fraunhofer-Publica