Group Integrated Sensor Systems

The group’s research focuses on developing functional, gas-sensitive materials and surfaces as well as miniaturized gas sensor systems. We always keep the specific application in mind when synthesizing and processing gas-sensitive materials and surfaces. We construct miniaturized gas sensor systems by integrating sensor technology and electronics into compact and cost-effective microsystems. One example is microstructured infrared emitters which are integrated into micro-opto-electro-mechanical systems (MOEMS) as light sources. We develop particularly small, inexpensive and energy-efficient gas sensors to be embedded in wireless sensor networks or mobile end devices. They can be used for ventilation applications, toxic gas detection, and quality control for food in storage or during transportation, as well as for smart applications such as in smart homes.

Gas sensitive materials

  • Materials synthesis and processing, layers of a few nm to some µm, coatings of micro-structured substrates (MEMS)
  • Semiconductor gas sensors: metal oxide layers such as SnO2, WO3 or Cr2–xTixO3+z with catalytic additives
  • Colorimetric gas sensors, e.g. color change materials for CO, NO2, NH3 , H2S, and volatile organic compounds (VOC)

Micro-optical components

  • IR emitters for a wavelength range of 5 to 12 µm, can be modulated if desired
  • IR detectors (e.g. made of PbSe) for a wavelength range of 3 to 5 µm
  • Diffractive optics, e.g. Fresnel lenses made of silicon or components for IR emitters

Miniaturized gas sensor systems

  • Detection of gas concentrations from ppb to percent according to measurement principle applied; modular systems by combining various sensor principles
  • Sensor technology for energy self-sufficient systems with wireless communication
  • Photoacoustic systems, filter photometers and miniaturized gas chromatography systems